Implement Finite Element Method on the Calibration Coefficients of Integral FIB-DIC Ring-core Residual Stress Measurement of Thin Films

[Display omitted] •The non-uniform residual stress in thin films was measured using the integral FIB-DIC ring-core method.•Calibration coefficients essential for the method were computed through detailed numerical simulations.•The influence of ring-core geometry on these calibration coefficients was examined.•The integral FIB-DIC ring-core method was validated using finite element simulations under external loading conditions. The sputtering deposition process involves creating thin films on the desired substrate that range in thickness from a few nanometers to a few micrometers. Thin film deposition can cause residual stresses to develop within both the substrate and the film due to mechanics and thermal and microscopic changes in material structure. Residual stresses in thin films can be undesirable, and their accurate identification can prevent thin film damage. The Focused Ion Beam – Digital Image Correlation (FIB-DIC) ring-core method is advantageous for evaluating residual stress profiles when fine detail is required. This paper presented appropriate coefficients that can be utilized to evaluate non-uniform residual stress distributions in thin film by using integral FIB-DIC ring-core methods. It was observed that calibration coefficients for general applications can be determined by developing a Finite Element (FE) analysis of the ring-core cutting process. To expand the application of the calibration coefficients of the integral ring-core method, ABAQUS was used to implement a parametric sweep over a wide range of thicknesses and core diameters. The validation of standard coefficients and the practice of determining the residual stress of thin films are discussed using the integral FIB-DIC ring-core method.