One step coating anti-reflective SiO2 film for silicon solar cells applications by atmospheric pressure plasma jet

•Anti-reflective SiO2 coatings were prepared by atmospheric pressure plasma jet.•The deposition method can be applied to the online deposition for solar panels.•The efficiency of solar cell with AR coating increases from 24.03% to 24.28%. By utilizing an atmospheric pressure plasma jet, a one-step deposition of anti-reflective silicon dioxide coating was successfully achieved on solar cover glass. A two-dimensional moving platform was utilized to coat large-area cover glass measuring 300 mm * 300 mm. Remarkably, at an input power of 40 W, the temperature of the cover glass remained as low as 59.4 °C. The impact of different motion patterns on the anti-reflective properties of the film was thoroughly investigated. Upon assembling the solar cells, a notable efficiency enhancement from 24.03% to 24.28% was observed. This method demonstrates promising prospects for repairing anti-reflective films on malfunctioning solar cell modules in photovoltaic power plants.