Synthesis of medium entropy Mn1.56Co0.96Ni0.48O4 films by solid-state reaction

Five metal layers (Mn/Co/Mn/Ni/Mn) were deposited on Si substrate by electron beam evaporation and then annealed in air to form a Mn1.56Co0.96Ni0.48O4 spinel oxide film. The increase in annealing temperature led to a gradual growth in the grain size. While sample annealed at 650 ​°C exhibits a poor surface morphology and lowest electrical resistivity, the sample at 750 ​°C is with the largest values of thermal constant B (4196 ​K) and activation energy Ea (0.361 ​eV). In sum, the proposed synthesis route of medium entropy Mn-based thermosensitive films was feasible and may be meaningful for preparation of other medium/high entropy materials. [Display omitted] •The proposed synthesis route of medium entropy MCNO spinel oxide films has been proven to be feasible.•From the perspective of research, we put forward the concept of medium entropy thermal sensitive material for the first time.•The optical and electrical properties of the film at different annealing temperatures are studied, which can provide help for readers of related research.•A simple method was developed to synthesize medium entropy thermosensitive films(MCN) by oxidizing five metal layers deposited by EBE.