Tantalum-containing coatings with superhard inclusions produced by DC-magnetron sputtering
A tantalum-containing two-layer coating consisting of a 50 nm thick tantalum oxide sublayer and a tantalum layer up to 1200 nm thick has been produced by DC-magnetron sputtering. On the surface of the coating grains, disoriented lamellar formations with an average size of 46 ± 1 nm were found, the h...
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| Veröffentlicht in: | International journal of refractory metals & hard materials 2023-04, Vol.112, p.106133, Article 106133 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | A tantalum-containing two-layer coating consisting of a 50 nm thick tantalum oxide sublayer and a tantalum layer up to 1200 nm thick has been produced by DC-magnetron sputtering. On the surface of the coating grains, disoriented lamellar formations with an average size of 46 ± 1 nm were found, the hardness of which was characterized by a bimodal distribution. The proportion of superhard inclusions with H = 76.19 ± 9.64 GPa was no |
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| ISSN: | 0263-4368 2213-3917 |
| DOI: | 10.1016/j.ijrmhm.2023.106133 |