Design, construction and performance of a TOF-SIMS for analysis of trace elements in geological materials

A new TOF-SIMS with high spatial and mass resolution has been constructed and applied to the in-situ micro-scale analysis of trace elements in geological materials with complex structural and chemical features. Double second-order reflectrons without mesh between different electric field regions of achieve greatly improved secondary ion transmission and mass resolution. The new TOF-SIMS can produce an O2- beam of ca. 5 μm diameter with a beam intensity of ca. 5 nA and a secondary ion mass resolution of more than 20,000 (FWHM). Functionality has been demonstrated by the analysis of Ti and rare earth elements in zircon. A new TOF-SIMS has been constructed and applied to the in-situ micro-scale analysis of trace elements in geological materials with complex structural and chemical features. The new TOF-SIMS can achieve an O2- beam of ca. 5 μm diameter with a beam intensity of ca. 5 nA, a secondary ion mass resolution of >20,000 (FWHM) and the detection limit of better than 0.2 ppm. Functionality has been demonstrated by the analysis of Ti and rare earth elements in zircon. [Display omitted] •A high-spatial/resolution TOF-SIMS has been constructed for in-situ trace elements analysis of geological materials.•Double second-order reflectrons without mesh were designed to improve the ion transmission and mass resolution.•A TOF of mass resolution >20,000 (FHWM) with high transmission has been achieved.•Functionality is demonstrated by the analysis of Ti and REEs in zircon.