Smooth polishing with non-linear compensation

Smooth polishing has a good improvement on the medium and high frequency errors of the workpiece, but the surface accuracy of the workpiece will be damaged subsequently. Therefore, a nonlinear compensation method is proposed. The realization mechanism, mathematical model and compensation effect of n...

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Veröffentlicht in:Optik (Stuttgart) 2022-07, Vol.262, p.169339, Article 169339
Hauptverfasser: Yin, Lianmin, Hu, Hao, Guan, Chaoliang, Xue, Shuai, Dai, Yifan
Format: Artikel
Sprache:eng
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Zusammenfassung:Smooth polishing has a good improvement on the medium and high frequency errors of the workpiece, but the surface accuracy of the workpiece will be damaged subsequently. Therefore, a nonlinear compensation method is proposed. The realization mechanism, mathematical model and compensation effect of nonlinear compensated smooth polishing are illustrated separately and verified by experiments. In addition, the process parameters and motion trajectory are optimized by theoretical simulation. The experimental results demonstrate that the full-band error of the workpiece can be improved simultaneously by the smooth polishing method based on nonlinear compensation. The number of iterations for the figuring experiments and smooth polishing is greatly reduced by the nonlinear compensation model, which is significantly beneficial to improve the surface convergence speed and lower the manufacturing cost. •Mathematical model of nonlinear compensation is developed.•The full-band error of the workpiece is converged.•Toolpath is optimized.•Process parameters are optimized.
ISSN:0030-4026
1618-1336
DOI:10.1016/j.ijleo.2022.169339