Integrated optical MEMS serially coupled double racetrack resonator based accelerometer

In this paper, a novel Integrated-Optical (IO) Micro-Electro-Mechanical-Systems (IO MEMS) serially coupled double racetrack resonator for accelerometer sensing applications is reported. The surface average stress is estimated for this acceleration using the Finite-Element-Method (FEM). The wavelength shift is observed for the corresponding pressure using the Finite-Difference-Time-Domain (FDTD) Method. In this sensor, the coupled resonator is integrated at the base of the mechanical microcantilever beam, where the accelerometer experiences the maximum stress. This accelerometer sensor works on the principle of change in the refractive-index of the coupled resonators. The change in the acceleration is read out as a shift in the resonant-wavelength at the drop-port of the double racetrack resonator accelerometer. The accelerometer provides a high Q-factor of 10,000, the sensitivity of 25 pm/g and a dynamic-range of ±5 g.