Theoretical analysis and comparative study of assorted diaphragm primarily based Micro Electro Mechanical System (MEMS) optical pressure sensors

In general, micro pressure sensors use a diaphragm as the sensing element that converts the applied pressure into the required displacement. Displacement is employed to sense real physical phenomena, such as pressure, force with various conduction methods. The conduction is defined as capacitive, piezoresistive, piezoelectric or resonant. Understanding the behavior of structural elements prior to its design is very essential depends on conductive method. The main challenge of parameter optimization of the diaphragm is to attain unsurpassed device performance. Therefore, theoretical analysis of various structures of optical Micro Electro Mechanical System (MEMS) sensor is proposed in this manuscript. Here, diaphragm geometries, like square, rectangular and circular are considered to analyze the structures. The objective of this work is to analyze various structures of optical MEMS sensor measuring pressure theoretically. The displacements of the varied diaphragms are compared for different thicknesses and the graphs are analyzed against their displacements. The best suitable structure of diaphragm for pressure sensor design is obtained. The diaphragm with good characteristics is virtually fabricated using Intellifab. The parameters such as linearity and relationship between pressure and intensity are obtained for the best suited diaphragm.