A novel hybrid piezo-triboelectric sensor (PTS) based on the surface modification for monitoring the operating status of the moving component

[Display omitted] •The piezo-triboelectric sensor (PTS) based on surface modification is analyzed.•The nanoparticle and frosted surface endow PTS with interference resistance.•The PTS with a hierarchical layout realizes synchronous detection of two states.•The PTS demonstrates definite sensing properties for various working conditions. Nowadays, industrial sensors based on piezo-triboelectric effects have been successfully applied for the detection of sophisticated devices. The current study proposes a novel hybrid piezo-triboelectric sensor (PTS) to detect the operating states of the moving component (MC) in the machine. Firstly, the PTS is designed as a hierarchical structure to achieve synchronous detection of two motion states of MCs. Secondly, the surface frosting and nanoparticle doping adds the friction coefficient of the sensor to improve charge transfer efficiency, so the voltage signals of the PTS are more than 39.05% higher than that of the sensor with smooth surfaces under 0.5 kPa ∼ 1.5 kPa pressure. In addition, the frosted surface reduces the impact of surface damage caused by impurities on the voltage signals compared with a smooth surface. Moreover, the direction sensing part within PTS contains 4 perceptual units to generate direction sensing signals that are correlated with state sensing signals to reflect the definite operating information of the MC. Meanwhile, the sensing properties of the PTS effectively demonstrate relative motion between the adjacent element and the MC in the actuator. With excellent performance, this work provides a new paradigm shift for the application of hybrid sensors in equipment detection.