Effects of two mild amino acids on benzotriazole residue desorption during cobalt post-chemical mechanical polishing cleaning: Experimental and theoretical studies

Effects of two mild amino acids on benzotriazole residue desorption during cobalt post-chemical mechanical polishing cleaning: Experimental and theoretical studies

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Veröffentlicht in:Colloids and surfaces. A, Physicochemical and engineering aspects Physicochemical and engineering aspects, 2024-02, Vol.683, p.133052, Article 133052
Hauptverfasser: Ji, Jinbo, Tan, Baimei, Zhang, Nannan, Ma, Tengda, Xu, Yi, Zhang, Shihao, Shi, Yunhui, Guo, Lei
Format: Artikel
Sprache:eng
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ISSN:0927-7757
DOI:10.1016/j.colsurfa.2023.133052