Electrical and surface properties of chemically deposited SrTiO3 films on ITO/glass substrate

In the present communication, for understanding the properties of thickness dependent STO/ITO thin films, the films were prepared using sol–gel sputtering technique wherein, different STO thickness are grown over ITO substrate. The structural properties understood using the XRD patterns wherein, observation shows the presence of amorphous STO without any detectable impurities. The Microstructural and cross-section analysis gives insight information of the films with batter distribution of grain and upper portion (STO) and lower portion (ITO) respectively which gets modifies with different thicknesses. The elemental composition of the studied films observed using EDAX and XPS spectrum reveals the only presence of required material with homogeneous distribution of all elements. From the a.c. conductivity and impedance spectroscopy the electrical properties of the films were measured wherein, for understanding the insight information’s the theoretical model such as; Jonscher’s power law, and Nyquist plot were fitted. The alternation of the properties can be studied using grain, grain boundaries, thickness of the film and different derived parameters.