P-n nanostructure formation effect of low-energy N2+ ions on n-GaAs surface

[Display omitted] •P-n structure is formed on the n-GaAs surface under low-energy N2+ ion implantation.•GaAs conductivity transformation occurs due to mechanical impact of nitrogen ions.•A concentrated GaAs1-xNx (x ∼ 0.1) alloy was formed by N2+ ion implantation.•GaAsN electron binding energies are: EB (Ga3d) = 19.42 eV and EB (N1s) = 397.0 eV.•3D p-n structures may be formed by N2+ ion beam without the wet lithography. The electronic structure and chemical composition of the n-GaAs surface after implantation of N2+ ions with energy Ei = 3000 eV and fluence Q ∼ 3 × 1015 cm−2 were studied by synchrotron-based X-ray photoelectron spectroscopy to clarify effects of low-energy nitrogen ion implantation on A3B5 semiconductor surfaces. Conversion of the conductivity type and creation of a p-n structure on the n-GaAs surface were revealed under N2+ ion irradiation. The conductivity type transformation was shown to occur due to pure mechanical action of nitrogen ions, resulting in formation of Ga anti-site acceptors. The ∼ 10 nm-thick p-layer obtained consisted of concentrated GaAs1-xNx (x ∼ 0.1) alloy whose bandgap width is known to be essentially narrower compared to the pristine GaAs semiconductor. Therefore, the structure formed is a nano-heterosctructure incorporating the semiconductor alloy whose properties are considered to be attractive for infrared applications. The obtained GaAsN electron binding energies (EB (N1s) = 397.0 eV, EB (Ga3d) = 19.42 eV and EB (As3d) = 41.25 eV) can be used for identification of the GaAsN alloy phase. An approach to 3D p-n structures formation was suggested using nitrogen ion beam without wet lithography.