Heterodyne Standing-Wave Interferometer with Improved Phase Stability
This paper describes a standing-wave interferometer with two laser sources of different wavelengths, diametrically opposed and emitting towards each other. The resulting standing wave has an intensity profile which is moving with a constant velocity, and is directly detected inside the laser beam by...
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Veröffentlicht in: | Nanomanufacturing and metrology 2021-09, Vol.4 (3), p.190-199 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | This paper describes a standing-wave interferometer with two laser sources of different wavelengths, diametrically opposed and emitting towards each other. The resulting standing wave has an intensity profile which is moving with a constant velocity, and is directly detected inside the laser beam by two thin and transparent photo sensors. The first sensor is at a fixed position, serving as a phase reference for the second one which is moved along the optical axis, resulting in a frequency shift, proportional to the velocity. The phase difference between both sensors is evaluated for the purpose of interferometric length measurements. |
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ISSN: | 2520-811X 2520-8128 |
DOI: | 10.1007/s41871-021-00098-3 |