Heterodyne Standing-Wave Interferometer with Improved Phase Stability

This paper describes a standing-wave interferometer with two laser sources of different wavelengths, diametrically opposed and emitting towards each other. The resulting standing wave has an intensity profile which is moving with a constant velocity, and is directly detected inside the laser beam by...

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Veröffentlicht in:Nanomanufacturing and metrology 2021-09, Vol.4 (3), p.190-199
Hauptverfasser: Ortlepp, Ingo, Zöllner, Jens-Peter, Rangelow, Ivo W., Manske, Eberhard
Format: Artikel
Sprache:eng
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Zusammenfassung:This paper describes a standing-wave interferometer with two laser sources of different wavelengths, diametrically opposed and emitting towards each other. The resulting standing wave has an intensity profile which is moving with a constant velocity, and is directly detected inside the laser beam by two thin and transparent photo sensors. The first sensor is at a fixed position, serving as a phase reference for the second one which is moved along the optical axis, resulting in a frequency shift, proportional to the velocity. The phase difference between both sensors is evaluated for the purpose of interferometric length measurements.
ISSN:2520-811X
2520-8128
DOI:10.1007/s41871-021-00098-3