Preparation and characterization of spray-pyrolyzed porous SiO2 nanoparticles for low dielectric constant applications

With the decreasing size of the integrated circuits, developments of materials with low dielectric constant have become an important research to solve the problems of parasitic capacitance. Thus in this study, low-cost SiO 2 and polylactic acid (PLA) were used for the fabrication of SiO 2 /PLA hybrid films targeting capacitor applications. SiO 2 nanoparticles with porous structure were prepared via spray pyrolysis with non-ionic surfactant F-127 as a pore-forming agent. In addition, surface morphology, porous structure, specific surface area, and particle porosity were examined via X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and nitrogen adsorption/desorption isotherms, respectively. Then, the SiO 2 /PLA hybrid films were fabricated and the resulting dielectric constants were measured. Finally, the resulting morphologies and properties and the corresponding mechanisms were discussed.