Plasmonic nanoantennae fabricated by focused Ion beam milling
We show a novel approach to fabricate plasmonic nanoantennae based on a maskless focused ion beam nanoring patterning process. Antenna nanoarrays with desired outlines are achieved by precisely controlling the geometric parameters during the milling process. Various nanoantenna designs of bow-tie, n...
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Veröffentlicht in: | International journal of precision engineering and manufacturing 2015-04, Vol.16 (4), p.851-855 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We show a novel approach to fabricate plasmonic nanoantennae based on a maskless focused ion beam nanoring patterning process. Antenna nanoarrays with desired outlines are achieved by precisely controlling the geometric parameters during the milling process. Various nanoantenna designs of bow-tie, nanoclusters (pentamers), and ellipsoid shaped satellites surrounded particle lattices are realized. The whole fabrication method is programmable and monolithic since only a one-step milling process is involved. The optical properties are experimentally characterized. Such nanoantennae may find extensive applications in chemical/bio-sensing due to remarkably enhanced near field intensity at the plasmon resonance. |
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ISSN: | 2234-7593 2005-4602 |
DOI: | 10.1007/s12541-015-0112-3 |