Plasmonic nanoantennae fabricated by focused Ion beam milling

We show a novel approach to fabricate plasmonic nanoantennae based on a maskless focused ion beam nanoring patterning process. Antenna nanoarrays with desired outlines are achieved by precisely controlling the geometric parameters during the milling process. Various nanoantenna designs of bow-tie, n...

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Veröffentlicht in:International journal of precision engineering and manufacturing 2015-04, Vol.16 (4), p.851-855
Hauptverfasser: Lv, Jiang-Tao, Yan, Yuan, Zhang, Wei-Kang, Liu, Yun-Hui, Jiang, Zi-Yu, Si, Guang-Yuan
Format: Artikel
Sprache:eng
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Zusammenfassung:We show a novel approach to fabricate plasmonic nanoantennae based on a maskless focused ion beam nanoring patterning process. Antenna nanoarrays with desired outlines are achieved by precisely controlling the geometric parameters during the milling process. Various nanoantenna designs of bow-tie, nanoclusters (pentamers), and ellipsoid shaped satellites surrounded particle lattices are realized. The whole fabrication method is programmable and monolithic since only a one-step milling process is involved. The optical properties are experimentally characterized. Such nanoantennae may find extensive applications in chemical/bio-sensing due to remarkably enhanced near field intensity at the plasmon resonance.
ISSN:2234-7593
2005-4602
DOI:10.1007/s12541-015-0112-3