Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing

ZnO microcrystals are synthesized through a facile solution method and characterized by field-emission scanning electron microscopy, transmission electron microscopy, selected area electron diffraction and X-ray diffraction. The ethanol sensing properties of these microcrystals are investigated by s...

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Veröffentlicht in:Chinese science bulletin 2009-12, Vol.54 (23), p.4371-4375
Hauptverfasser: Liu, Li, Zhang, Tong, Li, ShouChun, Wang, LianYuan, Tian, YunXia
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Sprache:eng
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Zusammenfassung:ZnO microcrystals are synthesized through a facile solution method and characterized by field-emission scanning electron microscopy, transmission electron microscopy, selected area electron diffraction and X-ray diffraction. The ethanol sensing properties of these microcrystals are investigated by spin-coating them on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensitivity is up to 8 when the sensor is exposed to 50 ppm ethanol, and the response time and recovery time are 10 s and 20 s, respectively. A contact-controlled model is established to explain the sensing properties of the microcrystals, which provides another approach to realize high-performance gas sensors.
ISSN:1001-6538
2095-9273
1861-9541
2095-9281
DOI:10.1007/s11434-009-0662-9