MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature

Microelectromechanical system (MEMS) devices based on electro-thermal actuation have been used over the past few years to perform tensile tests on nanomaterials. However, previous MEMS designs only allowed small ( e . g .,

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Bibliographische Detailangaben
Veröffentlicht in:	Experimental mechanics 2012-07, Vol.52 (6), p.607-617
Hauptverfasser:	Pant, B., Choi, S., Baumert, E. K., Allen, B. L., Graham, S., Gall, K., Pierron, O. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Biomedical Engineering and Bioengineering Characterization and Evaluation of Materials Circuit properties Condensed matter: structure, mechanical and thermal properties Control Dynamical Systems Electric, optical and optoelectronic circuits Electronics Engineering Exact sciences and technology Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Lasers Measurement and testing methods Mechanical and acoustical properties of condensed matter Mechanical instruments, equipment and techniques Mechanical properties of nanoscale materials Micromechanical devices and systems Optical and optoelectronic circuits Optical Devices Optics Photonics Physics Solid Mechanics Structural and continuum mechanics Vibration
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Beschreibung
Zusammenfassung:	Microelectromechanical system (MEMS) devices based on electro-thermal actuation have been used over the past few years to perform tensile tests on nanomaterials. However, previous MEMS designs only allowed small ( e . g .,
ISSN:	0014-4851 1741-2765
DOI:	10.1007/s11340-011-9526-8