Dependence of {111}-textured Pt electrode properties on TiO2 seed layers formed by thermal oxidation

The Pt/TiO 2 /SiO 2 /Si electrode structure prepared using sputter deposition of Ti, conversion of Ti to TiO 2 by thermal oxidation, and sputter deposition of Pt was evaluated by using measurements of sheet resistance and X-ray diffraction. Nonlinearity of the reciprocal sheet resistance dependence...

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Veröffentlicht in:Journal of materials science. Materials in electronics 2018, Vol.29 (1), p.412-426
Hauptverfasser: Fox, Glen R., Potrepka, Daniel M., Polcawich, Ronald G.
Format: Artikel
Sprache:eng
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Zusammenfassung:The Pt/TiO 2 /SiO 2 /Si electrode structure prepared using sputter deposition of Ti, conversion of Ti to TiO 2 by thermal oxidation, and sputter deposition of Pt was evaluated by using measurements of sheet resistance and X-ray diffraction. Nonlinearity of the reciprocal sheet resistance dependence on thickness revealed a change in the Ti conductivity that was attributed to a change in the Ti microstructure. Upon conversion to TiO 2 , it was determined that TiO 2 exhibits a critical thickness of 32 nm that minimizes normal strain and {100}-textured misorientation and correlates with the onset of the Ti reciprocal sheet resistance nonlinearity. Both the TiO 2 {100}-strain and {100}-texture directly affects the {111}-textured growth of Pt deposited at 500 °C. Pt deposited onto TiO 2 films with the critical thickness of 32 nm exhibits a maximization of the normal strain relative to bulk Pt and also displays the narrowest distribution of Pt {111}-textured grain misalignment. The results presented show how Ti deposition conditions, TiO 2 anneal conditions, and TiO 2 thickness combine to modify the Pt electrode structural properties. Additionally, the measurement techniques demonstrated for the Ti, TiO 2 , and Pt are applicable to process control monitoring as well as standardized comparison of electrode structures used in integrated piezoelectric and ferroelectric devices.
ISSN:0957-4522
1573-482X
DOI:10.1007/s10854-017-7930-2