On the design of feed-forward ΣΔ interface for MEMS based accelerometers

High order ΣΔ interface is popular for high resolution micro-electro-mechanical systems. Previous researches are mainly about the coefficients of the multiple feedback electromechanical ΣΔ modulators. In the work presented here, a systematic design method for the feed forward ΣΔ interfaces is proposed. Simulations show that utilizing the proposed method, feed forward and the optimized multiple feedback electromechanical sigma-delta modulators have almost the same SQNRs when a compensator pole is added to the feed forward structure. However, the feed forward structures have many advantages, so the proposed method is a promising alternative method for the multiple feedback structure.