Effect of surface on nano-beam mechanical behaviors: a parametric analysis

In this paper, effect of surface, including its elasticity, residual stress and density is investigated on the nano-beam stiffness and mass analytically. To this aim, the governing equation of the nano-beam dynamic behavior is extracted utilizing Gurtin–Murdoch’s theory and Euler–Bernoulli hypothesi...

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Veröffentlicht in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2021-03, Vol.27 (3), p.665-672
1. Verfasser: Maani Miandoab, Ehsan
Format: Artikel
Sprache:eng
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Zusammenfassung:In this paper, effect of surface, including its elasticity, residual stress and density is investigated on the nano-beam stiffness and mass analytically. To this aim, the governing equation of the nano-beam dynamic behavior is extracted utilizing Gurtin–Murdoch’s theory and Euler–Bernoulli hypothesis which incorporates the surface effects. Effect of surface parameters on nano-beam lumped mass and stiffness is investigated parametrically and necessary conditions for hardening and softening behavior are presented based on the surface stress and elasticity for both clamped–clamped and clamped-free nano-beams. The performed analysis revealed that surface may have different effects on similar nano-beams with only different boundary conditions. The obtained results in this paper can be utilized in analysis and design of nano-systems.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-020-04982-8