Impact of design parameters on working stability of the electrothermal V-shaped actuator
This paper mentions a detail calculation of the equivalent dynamic parameters in differential equations of motion of the electrothermal V-shaped actuator. A heat transfer model for a thin beam (including the dependence of material properties on the temperature) is applied in order to solve more exac...
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Veröffentlicht in: | Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2020-05, Vol.26 (5), p.1479-1487 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | This paper mentions a detail calculation of the equivalent dynamic parameters in differential equations of motion of the electrothermal V-shaped actuator. A heat transfer model for a thin beam (including the dependence of material properties on the temperature) is applied in order to solve more exactly temperature distribution and displacement of V-shaped beam system. Comparing the values of displacement in both calculation and simulation confirmed a higher accuracy of proposed equations. Moreover, a related formula between the minimum conversion stiffness and driving voltage amplitude is analyzed and examined to avoid the buckling phenomenon may occur in V-shaped beam system while working at a high voltage. |
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ISSN: | 0946-7076 1432-1858 |
DOI: | 10.1007/s00542-019-04682-y |