A review of MEMS inertial switches

A microelectromechanical system (MEMS) inertial switch is both a sensor and an actuator by only capturing a threshold and a close/open timestamp, yielding unique benefits like lower power consumption, lower costs, small size and large volume production. A comprehensive survey of the design schemes, performance aspects and dynamic test methods of the MEMS inertial switches is provided. Different reported varieties and design schemes of the switch have been reviewed emphasizing on directional sensitivity, acceleration threshold sensitivity, mechanism of contact-enhancement, and their advantages and disadvantages. Further, the dynamic test methods to provide feedback to the design-and-simulation process, including electrical method and optical methods, have been compared and discussed. In the end, a main summary and outlook about the MEMS inertial switches has been provided to aid in the development of the future research in this field.