Scale factor model analysis of MEMS gyroscopes

Scale factor nonlinearity is one of the main errors of MEMS gyroscopes. The paper firstly analyzes the operating principle of MEMS gyroscopes, and presents the commonly used model in calibration process. It is proved that calibrating the gyroscope scale factor in segments will result in higher fitting accuracy. Since it is difficult to determine the inverse function of a higher order function in microprocessor, this paper has developed a new calibration model, including the selection of suitable segment points based on the fitting residual error. The paper further analyses and compensates for the temperature effect on scale factor due to its sever influences. The enhanced model with the proposed temperature compensation has further improved the fitting accuracy significantly.