Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications
Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for impri...
Gespeichert in:
Veröffentlicht in: | Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2013-08, Vol.19 (8), p.1185-1194 |
---|---|
Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for imprinting on glass and polymer microfluidics devices. Good quality microstructures were fabricated on silicon, nickel alloy, cooper/brass and alumina, respectively by laser writing which proved that the nanosecond DPSS laser is suitable for rapid prototyping and rapid manufacturing of surface microstructures on different substrates as mask-less exposure system of imprinting. |
---|---|
ISSN: | 0946-7076 1432-1858 |
DOI: | 10.1007/s00542-012-1718-3 |