Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications

Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for impri...

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Veröffentlicht in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2013-08, Vol.19 (8), p.1185-1194
Hauptverfasser: Chen, Qiuling, Maccioni, Gabriele, Chen, Qiuping, Sacco, Adriano, Ferrero, Sergio, Scaltrito, Luciano
Format: Artikel
Sprache:eng
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Zusammenfassung:Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for imprinting on glass and polymer microfluidics devices. Good quality microstructures were fabricated on silicon, nickel alloy, cooper/brass and alumina, respectively by laser writing which proved that the nanosecond DPSS laser is suitable for rapid prototyping and rapid manufacturing of surface microstructures on different substrates as mask-less exposure system of imprinting.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-012-1718-3