Fabrication of PZT nano dot array and their ferroelectric properties

This paper demonstrates a promising and low-cost method for fabricating PZT nano-dot array by using sol–gel template method combined with laser interference lithography. ZrO 2 template with the pitch of 1 μm is firstly fabricated by sol–gel method and laser interference with a 325 nm He-Cd laser. Afterwards, PZT nano dot array with diameter of 500 nm and thickness of 20 nm is prepared on the ZrO 2 template. Atomic force microscope results show that the PZT nano dot array is uniform and highly ordered. Ferroelectric properties of PZT nano dot array are in situ measured through online-operation of TF analyzer and AFM. A ferroelectric hysteresis loop is obtained for the PZT nano dot.