Design and simulation of a novel bridge-like coplanar waveguide for microelectromechanical systems

In this paper, a kind of novel bridge-like coplanar waveguide has been designed and simulated at 10 GHz. Compared with conventional CPW, this design has lower attenuation and wider available characteristic impedance range. In addition, this design can avoid the interference among the adjacent compon...

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Veröffentlicht in:	Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2008-01, Vol.14 (1), p.95-98, Article 95
Hauptverfasser:	Sun, Xiaofeng, Ding, Guifu, Wang, Hong, Jiang, Zhenxin, Li, Binhong, Shen, Minyi
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Electronics and Microelectronics Engineering Exact sciences and technology Instrumentation Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical Engineering Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Nanotechnology Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Technical Paper
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Zusammenfassung:	In this paper, a kind of novel bridge-like coplanar waveguide has been designed and simulated at 10 GHz. Compared with conventional CPW, this design has lower attenuation and wider available characteristic impedance range. In addition, this design can avoid the interference among the adjacent components of RF MEMS devices.
ISSN:	0946-7076 1432-1858
DOI:	10.1007/s00542-007-0395-0