Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography

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Veröffentlicht in:	Microsystem technologies 2007-02, Vol.13 (3-4), p.209-214
Hauptverfasser:	KHUMPUANG, Sommawan, HORADE, Mitsuhiro, FUJIOKA, Kazuya, SUGIYAMA, Susumu
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Foundry engineering Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Metals. Metallurgy Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Other casting methods. Solidification Physics Precision engineering, watch making Production techniques Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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