A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications

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Bibliographische Detailangaben
Veröffentlicht in:	Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2005-02, Vol.11 (2-3), p.204-209
Hauptverfasser:	LIN, W. T, CHIOU, J. C, TSOU, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Optical and optoelectronic circuits Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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