Fabrication of on-chip microcapillary using photosensitive glass

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Bibliographische Detailangaben
Veröffentlicht in:	Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2003-10, Vol.9 (8), p.541-545
Hauptverfasser:	ETOH, S, FUJIMURA, T, HATTORI, R, KUROKI, Y
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Biological and medical sciences Bioreactors Biotechnology Electronics Exact sciences and technology Fluid dynamics Fluidics Fundamental and applied biological sciences. Psychology Fundamental areas of phenomenology (including applications) Lithography, masks and pattern transfer Methods. Procedures. Technologies Microelectronic fabrication (materials and surfaces technology) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Various methods and equipments
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