Physical and electrical properties of band-engineered SiO2/(TiO2)x(SiO2)1−x stacks for nonvolatile memory applications
In our study, the physical properties of (TiO 2 ) x (SiO 2 ) 1− x , including band-gap, band-offset, and thermal stability and the electrical properties of band-engineered SiO 2 /(TiO 2 ) x (SiO 2 ) 1− x tunnel barrier stacks, including the tunneling current and charge-trapping characteristics for a...
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Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 2012-09, Vol.108 (3), p.679-684 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In our study, the physical properties of (TiO
2
)
x
(SiO
2
)
1−
x
, including band-gap, band-offset, and thermal stability and the electrical properties of band-engineered SiO
2
/(TiO
2
)
x
(SiO
2
)
1−
x
tunnel barrier stacks, including the tunneling current and charge-trapping characteristics for applications to nonvolatile memory devices were investigated. It was observed that the band-gap and band-offset of (TiO
2
)
x
(SiO
2
)
1−
x
can be controlled by adjustment in the composition of the (TiO
2
)
x
(SiO
2
)
1−
x
films. Ti-silicate film with TiO
2
:SiO
2
cycle ratio of 1:5 was maintained in an amorphous phase, even after annealing at 950 °C. The tunneling current of the band-engineered SiO
2
/(TiO
2
)
x
(SiO
2
)
1−
x
stacked tunnel barrier was larger than that of a single SiO
2
barrier under a higher external bias, while the tunneling current of a SiO
2
/(TiO
2
)
x
(SiO
2
)
1−
x
stacked tunnel barrier under a lower external bias was smaller. Charge-trapping tests showed that the voltage shift for SiO
2
/(TiO
2
)
x
(SiO
2
)
1−
x
is slightly larger than that for single SiO
2
. |
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ISSN: | 0947-8396 1432-0630 |
DOI: | 10.1007/s00339-012-6950-2 |