Mechanism and characteristics of steam laser patterning

Steam laser patterning of thin films and/or solid surfaces has been studied by jetting a beam of steam, such as water vapor, onto a sample surface to form a thin liquid film on it and patterning the sample by laser etching along predetermined path. In steam laser patterning, bubbles are formed in a thin liquid film on a sample surface irradiated by a pulsed laser. When the collapsed shock wave generated at the moment of bubble collapse and the high-speed liquid jet formed during bubble collapse are strong enough, cavitation erosion of the sample surface takes place. Compared to dry laser patterning, the etching rate can be greatly enhanced and no shoulder-like structure is formed at the rim of the laser-irradiated spot in steam laser patterning due to this cavitation erosion effect.