Influence of the substrate temperature on BCN films deposited by sequential pulsed laser deposition
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| Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 1999-12, Vol.69 (7), p.S667-S670 |
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| Sprache: | eng |
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| container_end_page | S670 |
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| container_issue | 7 |
| container_start_page | S667 |
| container_title | Applied physics. A, Materials science & processing |
| container_volume | 69 |
| creator | Teodorescu, V.S. Luches, A. Dinu, R. Zocco, A. Ciobanu, M.F. Martino, M. Sandu, V. Dinescu, M. |
| description | |
| doi_str_mv | 10.1007/s003390051501 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0947-8396 |
| ispartof | Applied physics. A, Materials science & processing, 1999-12, Vol.69 (7), p.S667-S670 |
| issn | 0947-8396 1432-0630 |
| language | eng |
| recordid | cdi_crossref_primary_10_1007_s003390051501 |
| source | SpringerLink Journals - AutoHoldings |
| title | Influence of the substrate temperature on BCN films deposited by sequential pulsed laser deposition |
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