Growth of high-quality GaSb by metalorganic vapor phase epitaxy

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Veröffentlicht in:	Journal of electronic materials 1995-11, Vol.24 (11), p.1691-1696
Hauptverfasser:	KOLJONEN, T, SOPANEN, M, LIPSANEN, H, TUOMI, T
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Vapor phase epitaxy growth from vapor phase
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ispartof	Journal of electronic materials, 1995-11, Vol.24 (11), p.1691-1696
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source	SpringerLink Journals - AutoHoldings
subjects	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Vapor phase epitaxy growth from vapor phase
title	Growth of high-quality GaSb by metalorganic vapor phase epitaxy
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