Ionic processes in dielectric layers on silicon surface and their effect on electrophysical properties of silicon-dielectric boundary
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Veröffentlicht in: | Soviet Physics Journal 1977-09, Vol.20 (9), p.1156-1159 |
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container_issue | 9 |
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container_title | Soviet Physics Journal |
container_volume | 20 |
creator | Tarantov, Yu. A. Kas'yanenko, E. V. Konorov, P. P. Bulavinov, V. V. |
description | |
doi_str_mv | 10.1007/BF00897119 |
format | Article |
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language | eng |
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title | Ionic processes in dielectric layers on silicon surface and their effect on electrophysical properties of silicon-dielectric boundary |
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