Near surface modification of silica structure induced by chemical/mechanical polishing

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of materials science 1994-09, Vol.29 (17), p.4554-4558
Hauptverfasser:	TROGOLO, J. A, RAJAN, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Electronics Exact sciences and technology Lithography, masks and pattern transfer Materials science Microelectronic fabrication (materials and surfaces technology) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Solid surfaces and solid-solid interfaces Surface structure and topography Surface treatments Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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