Film deposition by plasma techniques (Schichtabscheidung mit Plasmaverfahren). von K. Konuma, Springer Series on Atoms and Plasmas, Band 10, Berlin: Springer (1992), ca. 250 S., DM 98

Film deposition by plasma techniques (Schichtabscheidung mit Plasmaverfahren). von K. Konuma, Springer Series on Atoms and Plasmas, Band 10, Berlin: Springer (1992), ca. 250 S., DM 98

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Veröffentlicht in:Vakuum in Forschung und Praxis 1994, Vol.6 (1), p.59-59
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title Film deposition by plasma techniques (Schichtabscheidung mit Plasmaverfahren). von K. Konuma, Springer Series on Atoms and Plasmas, Band 10, Berlin: Springer (1992), ca. 250 S., DM 98
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