Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors (Small 48/2022)

Suspended 1D Nanoheaters In article number 2204078, Heungjoo Shin and co‐workers report a suspended 1D nanoheater capable of ultrarapid heating at an ultralow power. The nanoheater is implemented as a gas sensor by the regioselective growth of metal oxide nanomaterials, enabling reliable and sensiti...

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Veröffentlicht in:Small (Weinheim an der Bergstrasse, Germany) Germany), 2022-12, Vol.18 (48), p.n/a
Hauptverfasser: Kim, Taejung, Cho, Wootaek, Kim, Beomsang, Yeom, Junyeong, Kwon, Yeong Min, Baik, Jeong Min, Kim, Jae Joon, Shin, Heungjoo
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Sprache:eng
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Zusammenfassung:Suspended 1D Nanoheaters In article number 2204078, Heungjoo Shin and co‐workers report a suspended 1D nanoheater capable of ultrarapid heating at an ultralow power. The nanoheater is implemented as a gas sensor by the regioselective growth of metal oxide nanomaterials, enabling reliable and sensitive gas detection. This sophisticated nanodevice can be manufactured using batch microfabrication technology exclusively, offering promising pathways for applications in various electrothermal devices.
ISSN:1613-6810
1613-6829
DOI:10.1002/smll.202270258