A method to subtract the transmission and dispersion analyser effect from high-intensity, low-resolution XPS spectra

The quality of XPS and AES data in terms of both peak position and intensity is critically dependent on the experimental conditions. It is known that when using the electron energy analyser‐detector system under different experimental conditions, the relative intensity peak ratios change remarkably. The knowledge of the energy dependence of the spectrometer's intensity response function is important for quantitative analyses. In order to handle experimental conditions (e.g. small‐area XPS) a methodological procedure to estimate the effect of individual parameters is proposed. According to this procedure the spectra are manipulated using a modified deconvolution routine that contemporaneously takes into account the relative transmission function and analyser broadening function.