Rotational Auger depth profiling of a GaAs/AlGaAs multilayer structure

A superlattice sample consisting of 200 alternating 5 nm layers of GaAs and Al0.45Ga0.55As was analyzed to explore some of the factors affecting depth resolution in rotational depth profiling by AES, including coincidence of sample rotation and probe beam axes, stability of analysis position and pro...

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Veröffentlicht in:	Surface and interface analysis 1992-06, Vol.18 (6), p.381-386
1. Verfasser:	Ericson, R. E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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