Performance and application of the scienta ESCA300 spectrometer
The Scienta ESCA300 is a state‐of‐the‐art x‐ray photoelectron spectrometer with high intensity, and high energy and spatial resolution. This unique combination of features is made possible by the use of a high‐power rotating anode x‐ray source with monochromatization, high transmission and imaging e...
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| Veröffentlicht in: | Surface and interface analysis 1990-09, Vol.15 (9), p.541-549 |
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| container_end_page | 549 |
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| container_issue | 9 |
| container_start_page | 541 |
| container_title | Surface and interface analysis |
| container_volume | 15 |
| creator | Beamson, G. Briggs, D. Davies, S. F. Fletcher, I. W. Clark, D. T. Howard, J. Gelius, U. Wannberg, B. Balzer, P. |
| description | The Scienta ESCA300 is a state‐of‐the‐art x‐ray photoelectron spectrometer with high intensity, and high energy and spatial resolution. This unique combination of features is made possible by the use of a high‐power rotating anode x‐ray source with monochromatization, high transmission and imaging electron optics and a multichannel detector. The first ESCA300 has been installed recently at ICI Wilton. We report on the performance of this instrument for conducting samples and as a microanalytical device. Also described are its performance for insulating samples (polymer films) and studies of charge compensation using the Bremsstrahlung‐induced electrons from an unmonochromated dual anode x‐ray source. |
| doi_str_mv | 10.1002/sia.740150908 |
| format | Article |
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| ispartof | Surface and interface analysis, 1990-09, Vol.15 (9), p.541-549 |
| issn | 0142-2421 1096-9918 |
| language | eng |
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| source | Wiley Online Library Journals Frontfile Complete |
| subjects | Electron, positron and ion microscopes, electron diffractometers and related techniques Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics |
| title | Performance and application of the scienta ESCA300 spectrometer |
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