Performance and application of the scienta ESCA300 spectrometer

The Scienta ESCA300 is a state‐of‐the‐art x‐ray photoelectron spectrometer with high intensity, and high energy and spatial resolution. This unique combination of features is made possible by the use of a high‐power rotating anode x‐ray source with monochromatization, high transmission and imaging e...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Surface and interface analysis 1990-09, Vol.15 (9), p.541-549
Hauptverfasser:	Beamson, G., Briggs, D., Davies, S. F., Fletcher, I. W., Clark, D. T., Howard, J., Gelius, U., Wannberg, B., Balzer, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron, positron and ion microscopes, electron diffractometers and related techniques Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The Scienta ESCA300 is a state‐of‐the‐art x‐ray photoelectron spectrometer with high intensity, and high energy and spatial resolution. This unique combination of features is made possible by the use of a high‐power rotating anode x‐ray source with monochromatization, high transmission and imaging electron optics and a multichannel detector. The first ESCA300 has been installed recently at ICI Wilton. We report on the performance of this instrument for conducting samples and as a microanalytical device. Also described are its performance for insulating samples (polymer films) and studies of charge compensation using the Bremsstrahlung‐induced electrons from an unmonochromated dual anode x‐ray source.
ISSN:	0142-2421 1096-9918
DOI:	10.1002/sia.740150908