Charge compensation and high-resolution TOFSIMS imaging of insulating materials

Charge compensation and high-resolution TOFSIMS imaging of insulating materials

A charge compensation system, based on a pulsed lowenergy electron flood source, designed for the 1X23S time‐of‐flight secondary ion mass spectrometry (TOFSIMS) instrument is described. Its performance in the non‐imaging mode is illustrated by spectra from polytetrafluoroethene (PTFE). High‐resoluti...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Surface and interface analysis 1990-01, Vol.15 (1), p.62-65
Hauptverfasser: Briggs, D., Hearn, M. J., Fletcher, I. W., Waugh, A. R., McIntosh, B. J.
Format: Artikel
Sprache:eng
Schlagworte:
Application fields
Applied sciences
Exact sciences and technology
Polymer industry, paints, wood
Technology of polymers
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A charge compensation system, based on a pulsed lowenergy electron flood source, designed for the 1X23S time‐of‐flight secondary ion mass spectrometry (TOFSIMS) instrument is described. Its performance in the non‐imaging mode is illustrated by spectra from polytetrafluoroethene (PTFE). High‐resolution (∼1 pm) imaging of challenging insulating samples under near‐static SIMS conditions is demonstrated for the first time.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.740150111