Microstructure and properties of Fe-N/Ti-N magnetic multilayers

In the search for a better write head to be used in high‐density magnetic storage systems, Fe–N/Ti–N magnetic multilayers with different thickness Fe–N layers and 2 nm thickness Ti–N layers were prepared by magnetron sputtering. The multilayer structures and magnetic properties were characterized with low‐angle scattering, high‐angle x‐ray diffraction, atomic force microscopy (AFM) and magnetometry. Microhardness and the reduced modulus of the multilayer were measured by using a nanoindenter with a diamond tip in conjunction with AFM. The result of low‐angle x‐ray scattering of the multilayer shows that it has a periodic structure with sharp, flat interfaces. The structure of an Fe–N/Ti–N periodic multilayer has better mechanical properties than a single‐layered Fe–N film while retaining excellent soft magnetic properties. Among the samples studied, the Fe–N(5 nm)/Ti–N(2 nm) multilayer has the best general properties. Copyright © 2001 John Wiley & Sons, Ltd.