Experimental determination of angular-energy distributions of electrons backscattered by bulk gold and silicon samples

This work describes an experimental study of the backscattering of electron beams with an energy range between 20 and 100 keV. The energy distribution of electrons backscattered by bulk gold and silicon samples at different take‐off angles was determined with an original device. The different major sources of noise were studied and then the spectra obtained were processed. Theoretical interpretation of this phenomenon using Monte Carlo simulations will be presented in a future paper.