Chemical preparation of dielectrics for studying their microtopography by the SEM

A procedure for the chemical preparation of dielectrics to make their surfaces conductive is proposed. Its simplicity and rapidity, as well as the possibility of using it to study etching kinetics of specimen surface morphology are noteworthy. The procedure is demonstrated by the interaction of F‐ap...

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Veröffentlicht in:	Scanning 1992, Vol.14 (2), p.112-117
Hauptverfasser:	Dorozhkin, S. V., Nikolaev, A. L., Melikhov, I. V., Saparin, G. V., Bliadze, V. G.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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