Chemical preparation of dielectrics for studying their microtopography by the SEM

A procedure for the chemical preparation of dielectrics to make their surfaces conductive is proposed. Its simplicity and rapidity, as well as the possibility of using it to study etching kinetics of specimen surface morphology are noteworthy. The procedure is demonstrated by the interaction of F‐apatite with acids. The procedural steps include careful attention to the washing of the specimen following its interaction with an acid and to its drying thereafter. The composition of the washing solution and the washing time must be carefully controlled. Positive results are obtained for the interaction between F‐apatite and phosphoric, hydrochloric, nitric acids and between glass and hydrofluoric acid. Acetone was employed as the washing solution and in all cases sharp images of the specimen surface were obtained in the SEM. The subsequent washing of the specimen in water restored the dielectric properties of its surface. By sequentially etching, drying, and observing the specimen in the SEM, a series of images was obtained of an area of the surface as it was being etched. This series of images permitted determination of the growth rate of etched pits.