Effect of Ultra‐High‐Pressure Annealing on Defect Reactions in Ion‐Implanted GaN Studied by Positron Annihilation

The cover image shows a schematic illustration of atom probe tomography (APT) of Mg‐implanted GaN. Three arrows indicate the trajectories of field evaporated Ga, Mg, and N atoms from the surface of the tip‐shaped specimen (bottom left) to a position‐sensitive detector (top right). The 3D atom map of...

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Veröffentlicht in:physica status solidi (b) 2022-10, Vol.259 (10), p.n/a
Hauptverfasser: Uedono, Akira, Sakurai, Hideki, Uzuhashi, Jun, Narita, Tetsuo, Sierakowski, Kacper, Ishibashi, Shoji, Chichibu, Shigefusa F., Bockowski, Michal, Suda, Jun, Ohkubo, Tadakatsu, Ikarashi, Nobuyuki, Hono, Kazuhiro, Kachi, Tetsu
Format: Artikel
Sprache:eng
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Zusammenfassung:The cover image shows a schematic illustration of atom probe tomography (APT) of Mg‐implanted GaN. Three arrows indicate the trajectories of field evaporated Ga, Mg, and N atoms from the surface of the tip‐shaped specimen (bottom left) to a position‐sensitive detector (top right). The 3D atom map of Mg implanted by sequential N‐implantation after ultra‐high‐pressure annealing is shown top left, and a corresponding scanning transmission electron microscope (STEM) image is displayed bottom right. Complementary APT/STEM analysis reveals the Mg segregation at defects in the GaN specimen. For further details, see article number 2200183 by Akira Uedono and co‐workers.
ISSN:0370-1972
1521-3951
DOI:10.1002/pssb.202270028