Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique: Electrical and optical properties of ZnO layers grown by LT ALD
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| Veröffentlicht in: | physica status solidi (b) 2010-07, Vol.247 (7), p.1653-1657 |
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| container_end_page | 1657 |
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| container_issue | 7 |
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| container_title | physica status solidi (b) |
| container_volume | 247 |
| creator | Krajewski, Tomasz A. Dybko, Krzysztof Luka, Grzegorz Wachnicki, Lukasz Witkowski, Bartlomiej S. Duzynska, Anna Kopalko, Krzysztof Lusakowska, Elzbieta Kowalski, Bogdan J. Godlewski, Marek Guziewicz, Elzbieta |
| description | |
| doi_str_mv | 10.1002/pssb.200983678 |
| format | Article |
| fullrecord | <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1002_pssb_200983678</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1002_pssb_200983678</sourcerecordid><originalsourceid>FETCH-crossref_primary_10_1002_pssb_2009836783</originalsourceid><addsrcrecordid>eNqVj7FOw0AQRK8AiUBoqfcHbPZsFMc1CuID6E-X85ocsr3H7lnBfD0JIHqqGY3mFc-YO4ulRazuk-q-rBDbbb1pthdmhXWDhW2b6spcq74hPjS23azMvBsoZInBD-CnDjjl756EE0mOpMA9fMYpAH_EjmDwC4nCq_Bxgv0C-XDa-FhkGk-Az7MQ-MxjDD9X6Cixxhx5gkzhMMX3mdbmsveD0u1v3pjyaffy-FwEYVWh3iWJo5fFWXRnIXcWcn9C9b-BLygvWT4</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique: Electrical and optical properties of ZnO layers grown by LT ALD</title><source>Access via Wiley Online Library</source><creator>Krajewski, Tomasz A. ; Dybko, Krzysztof ; Luka, Grzegorz ; Wachnicki, Lukasz ; Witkowski, Bartlomiej S. ; Duzynska, Anna ; Kopalko, Krzysztof ; Lusakowska, Elzbieta ; Kowalski, Bogdan J. ; Godlewski, Marek ; Guziewicz, Elzbieta</creator><creatorcontrib>Krajewski, Tomasz A. ; Dybko, Krzysztof ; Luka, Grzegorz ; Wachnicki, Lukasz ; Witkowski, Bartlomiej S. ; Duzynska, Anna ; Kopalko, Krzysztof ; Lusakowska, Elzbieta ; Kowalski, Bogdan J. ; Godlewski, Marek ; Guziewicz, Elzbieta</creatorcontrib><identifier>ISSN: 0370-1972</identifier><identifier>DOI: 10.1002/pssb.200983678</identifier><language>eng</language><ispartof>physica status solidi (b), 2010-07, Vol.247 (7), p.1653-1657</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-crossref_primary_10_1002_pssb_2009836783</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Krajewski, Tomasz A.</creatorcontrib><creatorcontrib>Dybko, Krzysztof</creatorcontrib><creatorcontrib>Luka, Grzegorz</creatorcontrib><creatorcontrib>Wachnicki, Lukasz</creatorcontrib><creatorcontrib>Witkowski, Bartlomiej S.</creatorcontrib><creatorcontrib>Duzynska, Anna</creatorcontrib><creatorcontrib>Kopalko, Krzysztof</creatorcontrib><creatorcontrib>Lusakowska, Elzbieta</creatorcontrib><creatorcontrib>Kowalski, Bogdan J.</creatorcontrib><creatorcontrib>Godlewski, Marek</creatorcontrib><creatorcontrib>Guziewicz, Elzbieta</creatorcontrib><title>Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique: Electrical and optical properties of ZnO layers grown by LT ALD</title><title>physica status solidi (b)</title><issn>0370-1972</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNqVj7FOw0AQRK8AiUBoqfcHbPZsFMc1CuID6E-X85ocsr3H7lnBfD0JIHqqGY3mFc-YO4ulRazuk-q-rBDbbb1pthdmhXWDhW2b6spcq74hPjS23azMvBsoZInBD-CnDjjl756EE0mOpMA9fMYpAH_EjmDwC4nCq_Bxgv0C-XDa-FhkGk-Az7MQ-MxjDD9X6Cixxhx5gkzhMMX3mdbmsveD0u1v3pjyaffy-FwEYVWh3iWJo5fFWXRnIXcWcn9C9b-BLygvWT4</recordid><startdate>201007</startdate><enddate>201007</enddate><creator>Krajewski, Tomasz A.</creator><creator>Dybko, Krzysztof</creator><creator>Luka, Grzegorz</creator><creator>Wachnicki, Lukasz</creator><creator>Witkowski, Bartlomiej S.</creator><creator>Duzynska, Anna</creator><creator>Kopalko, Krzysztof</creator><creator>Lusakowska, Elzbieta</creator><creator>Kowalski, Bogdan J.</creator><creator>Godlewski, Marek</creator><creator>Guziewicz, Elzbieta</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>201007</creationdate><title>Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique</title><author>Krajewski, Tomasz A. ; Dybko, Krzysztof ; Luka, Grzegorz ; Wachnicki, Lukasz ; Witkowski, Bartlomiej S. ; Duzynska, Anna ; Kopalko, Krzysztof ; Lusakowska, Elzbieta ; Kowalski, Bogdan J. ; Godlewski, Marek ; Guziewicz, Elzbieta</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-crossref_primary_10_1002_pssb_2009836783</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Krajewski, Tomasz A.</creatorcontrib><creatorcontrib>Dybko, Krzysztof</creatorcontrib><creatorcontrib>Luka, Grzegorz</creatorcontrib><creatorcontrib>Wachnicki, Lukasz</creatorcontrib><creatorcontrib>Witkowski, Bartlomiej S.</creatorcontrib><creatorcontrib>Duzynska, Anna</creatorcontrib><creatorcontrib>Kopalko, Krzysztof</creatorcontrib><creatorcontrib>Lusakowska, Elzbieta</creatorcontrib><creatorcontrib>Kowalski, Bogdan J.</creatorcontrib><creatorcontrib>Godlewski, Marek</creatorcontrib><creatorcontrib>Guziewicz, Elzbieta</creatorcontrib><collection>CrossRef</collection><jtitle>physica status solidi (b)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Krajewski, Tomasz A.</au><au>Dybko, Krzysztof</au><au>Luka, Grzegorz</au><au>Wachnicki, Lukasz</au><au>Witkowski, Bartlomiej S.</au><au>Duzynska, Anna</au><au>Kopalko, Krzysztof</au><au>Lusakowska, Elzbieta</au><au>Kowalski, Bogdan J.</au><au>Godlewski, Marek</au><au>Guziewicz, Elzbieta</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique: Electrical and optical properties of ZnO layers grown by LT ALD</atitle><jtitle>physica status solidi (b)</jtitle><date>2010-07</date><risdate>2010</risdate><volume>247</volume><issue>7</issue><spage>1653</spage><epage>1657</epage><pages>1653-1657</pages><issn>0370-1972</issn><doi>10.1002/pssb.200983678</doi></addata></record> |
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| ispartof | physica status solidi (b), 2010-07, Vol.247 (7), p.1653-1657 |
| issn | 0370-1972 |
| language | eng |
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| source | Access via Wiley Online Library |
| title | Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique: Electrical and optical properties of ZnO layers grown by LT ALD |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-22T14%3A18%3A02IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Electrical%20and%20optical%20properties%20of%20zinc%20oxide%20layers%20grown%20by%20the%20low-temperature%20atomic%20layer%20deposition%20technique:%20Electrical%20and%20optical%20properties%20of%20ZnO%20layers%20grown%20by%20LT%20ALD&rft.jtitle=physica%20status%20solidi%20(b)&rft.au=Krajewski,%20Tomasz%20A.&rft.date=2010-07&rft.volume=247&rft.issue=7&rft.spage=1653&rft.epage=1657&rft.pages=1653-1657&rft.issn=0370-1972&rft_id=info:doi/10.1002/pssb.200983678&rft_dat=%3Ccrossref%3E10_1002_pssb_200983678%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |