Monolayer‐Range Compositional Modulations in Al x Ga 1− x N ( x = 0.6–0.75) Layers Grown Using Plasma‐Assisted Molecular Beam Epitaxy under Me‐Rich Conditions with an Off‐Centered Spatial Distribution of Activated Nitrogen Flux
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Veröffentlicht in: | Physica status solidi. A, Applications and materials science Applications and materials science, 2022-03, Vol.219 (6) |
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container_title | Physica status solidi. A, Applications and materials science |
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creator | Jmerik, Valentin Nechaev, Dmitrii Yagovkina, Maria Sitnikova, Alla Troshkov, Sergey Rzheutski, Mikalai Lutsenko, Eugenii Rouvimov, Sergei |
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doi_str_mv | 10.1002/pssa.202100550 |
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title | Monolayer‐Range Compositional Modulations in Al x Ga 1− x N ( x = 0.6–0.75) Layers Grown Using Plasma‐Assisted Molecular Beam Epitaxy under Me‐Rich Conditions with an Off‐Centered Spatial Distribution of Activated Nitrogen Flux |
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