Review and Comments for the Development of Point Defect‐Controlled CZ‐Si Crystals and Their Application to Future Power Devices (Phys. Status Solidi A 10∕2019)
Point Defects Point defect‐controlled Czochralski silicon (CZ‐Si) crystal growth technology is reviewed by manipulating the v/G ratio, where v is the growth rate and G is the axial temperature gradient in crystals. Cover: Schematics of v/G defect maps for CZ‐Si crystals, and defect pattern changes a...
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Veröffentlicht in: | Physica status solidi. A, Applications and materials science Applications and materials science, 2019-05, Vol.216 (10), p.n/a |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Point Defects
Point defect‐controlled Czochralski silicon (CZ‐Si) crystal growth technology is reviewed by manipulating the v/G ratio, where v is the growth rate and G is the axial temperature gradient in crystals. Cover: Schematics of v/G defect maps for CZ‐Si crystals, and defect pattern changes a), b), and c) with decreasing crystal pulling rate in conventional hot zone, and d) growth concept for grown‐in defect‐free crystal by using improved hot zone. More details can be found in article number 1800664 by Masataka Hourai, Shigeru Umeno and co‐workers. |
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ISSN: | 1862-6300 1862-6319 |
DOI: | 10.1002/pssa.201970035 |